4.3.18 · D2Semiconductor Fabrication

Visual walkthrough — Process nodes (28nm→7nm→5nm→3nm→2nm)

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We link the parent Process nodes and prerequisites as we meet them.


Step 1 — What a "pitch" is, and why area is a square

WHAT we do: draw one logic cell as a rectangle whose width and height are both set by the pitch .

WHY: transistors don't float freely — they sit on a grid of wires spaced by . If wires are apart, a cell can be no smaller than a few pitches wide and a few pitches tall. So both sides of the rectangle are proportional to .

PICTURE: look at the blue rectangle below. Its width and height are each some fixed multiple of the pitch (the orange bar).

The cell area is

Here is the floor space one transistor cell eats up. The key visual fact: because a rectangle has two sides and both track , area grows as squared, not . That single "squared" is the seed of everything.


Step 2 — Shrink the pitch by a factor : density doubles

WHAT we do: replace by everywhere and recompute the area.

WHY: a node shrink is not one feature getting smaller — it is the whole grid scaling down together. So both and shrink by .

PICTURE: the two rectangles below are the old cell and the shrunk cell. The new one is times narrower and times shorter, so it covers of the old floor space.

Now define density = transistors per unit area:

For a fixed die, the number of cells that fit is (die area). Since dropped by , the count — and hence density — rises by :

Plug in the classic : . A 0.7× linear shrink doubles the transistor count — this is the engine behind Moore's Law.


Step 3 — Where the energy goes: charging one capacitor

WHAT we do: compute the energy to charge from V up to the supply voltage .

WHY a capacitor, and why energy? Every "1→0→1" flip literally fills and empties this capacitor. To know the power we first need the energy per flip, and energy is the natural currency: it is what turns into heat.

PICTURE: the graph below plots charge on the horizontal axis against voltage on the vertical. Because , this is a straight line. The area under it is the stored energy — a triangle.

The energy stored is the triangle's area:

  • — because voltage rose gradually from 0 to , so on average you pushed charge against half the final voltage (the triangle, not the full rectangle).
  • — how much charge each volt buys.
  • — one from the charge , one from the voltage it climbed to.

That is the second squared in our story, and it is the reason voltage is the most powerful knob we have.


Step 4 — One full switch dissipates , and power is that times frequency

WHAT we do: track one complete cycle — charge up, then discharge — and multiply by how often it happens.

WHY: the stored is not lost; it comes back when the capacitor discharges — but it comes back as heat too. So a full charge-then-discharge cycle burns .

PICTURE: the timeline below shows the voltage rising and falling. Each up fills the triangle (heat in the transistor), each down empties it (heat again). Two triangles per cycle = one full .

Now multiply by rate. Let be the frequency (switch cycles per second) and the activity factor (the fraction of gates actually flipping each cycle — most sit idle):

  • — fraction that are busy (0 to 1); idle gates cost no dynamic energy.
  • — smaller transistors ⇒ smaller , so shrinking helps here too.
  • — the triangle's squared voltage; the biggest lever.
  • — cycles per second; doubling clock speed doubles this term.

See Dynamic vs static power for how this pairs with the leakage we build next.


Step 5 — The catch: to stay fast at low you must lower the threshold

WHAT we do: explain why you can't just lower the supply for free.

WHY: transistor speed depends on the overdrive — how far above threshold you drive it. If you lower but keep fixed, the overdrive shrinks and the chip slows. To stay fast you must also lower .

PICTURE: the two curves below show drain current vs gate voltage. Lowering the supply (moving the operating dot left) forces left too, to keep the same overdrive gap.

So far so good — but the next step shows the price of a low .


Step 6 — Leakage: the exponential wall

WHAT we do: write how depends on .

WHY exponential, and why specifically? The fraction of electrons that have enough thermal energy to hop a barrier of height (energy) follows a Boltzmann factor — nature's rule that the number able to climb an energy hill falls off as . The exponential is exactly the tool that answers "what fraction can clear a barrier of height ?" Nothing else captures that steep collapse.

PICTURE: the curve below plots against on a linear axis. It is a cliff: lower a little and leakage rockets up.

  • — charge of one electron (turns a voltage into an energy ).
  • — the barrier height in volts; the whole knob we are forced to lower.
  • — a fudge factor () for a non-ideal transistor.
  • — Boltzmann's constant; — temperature. Together is the typical thermal energy of an electron.
  • The minus sign in the exponent: bigger fewer electrons clear it ⇒ less leak. So lowering flips that to more leak — exponentially.

Total power is now two pieces:

See Subthreshold leakage.


Step 7 — The collision: why Dennard scaling broke (~2005)

WHAT we do: overlay the two forces — the gain from Step 4 (wants low ) and the penalty from Step 6 (punishes low ).

WHY they collide: Step 5 chained them: low requires low . So the moment you cash in the quadratic dynamic saving, you trip the exponential leakage. Below about V the rising leakage curve overtakes the falling dynamic curve — total power stops dropping and starts rising.

PICTURE: the two curves below cross. The blue dynamic curve falls as drops; the red leakage curve climbs. Their sum (green) has a minimum near V — you cannot go below it profitably.

This " won't go below V" is the whole reason voltage stalled, power density rose, and clock speeds plateaued. See Dennard scaling.


Step 8 — The escape: change the shape, not just the size

WHAT we do: if we can't lower 's leakage penalty by voltage, we lower it by giving the gate more grip on the channel.

WHY: the leakage in Step 6 comes from a channel the gate can't fully shut. Wrap the gate around more sides of the channel and its electric field controls the channel more completely — the "off" state becomes truly off, so we can run at low without the leakage cliff.

PICTURE: three cross-sections — planar (gate on 1 face), FinFET (gate on 3 faces), GAA nanosheet (gate on all 4 faces). More wrap ⇒ more control ⇒ leakage tamed.

  • Planar (≥28nm): gate on one face — weak control, leaks when short.
  • FinFET (22nm→7nm): gate on three sides of a raised fin.
  • GAA nanosheet (3nm, 2nm): gate on all four sides — strongest control.

Printing these tiny shapes needs sharp light: EUV (13.5 nm wavelength) replaced 193 nm deep-UV around 7 nm. Newest nodes also route power from the wafer's back — see Backside power delivery.


The one-picture summary

The single figure above stitches the chain together: squared area ⇒ density ; squared voltage ⇒ the tempting dynamic-power lever; exponential leakage ⇒ the wall that stops the lever; and the shape change (FinFET → GAA) that lets us keep going.

Recall Feynman retelling — say it out loud in plain words

Picture a tiny square of silicon. Every transistor sits on a grid, so its floor space is a rectangle whose two sides both track the wire spacing — that's why area goes as squared, and shrinking by doubles how many fit. Now every time a transistor flips, it fills a tiny bucket of charge to voltage ; the energy is a triangle, , and a fill-then-empty cycle burns , done times a second for the busy fraction — that's . The juicy trick: since it's squared, lowering the voltage a little saves a lot. But to stay fast at low you must lower the turn-on threshold — and a lower barrier lets far more electrons leak over it, following nature's exponential "how many can clear the hill" rule, . So dropping voltage helps quadratically but hurts exponentially; the two curves cross near V, and that's exactly where voltage — and Dennard scaling — froze around 2005. The fix wasn't a smaller ruler; it was wrapping the gate around more sides of the channel (1 → 3 → 4: planar → FinFET → GAA), so the transistor shuts fully even when tiny. That's what "3nm" and "2nm" really buy: not a 3-nanometre object, but more transistors, cooler switching, and a gate that finally keeps its grip.

Recall Quick self-check

Why does area scale as , not ? ::: A cell is a rectangle; both width and height shrink by , and area = width × height = old. Where does the in dynamic power come from? ::: Energy to charge a capacitor is the triangle — one from , one from the voltage climbed. Why can't we just keep lowering ? ::: To stay fast we must lower too, and leakage rises exponentially — the leak wall near V. How does GAA dodge that wall? ::: The gate wraps all 4 sides, giving strong enough electrostatic control to run low without runaway leakage.